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자동 양면 프로브 스테이션: 200 mm 웨이퍼용

| 주요기능

• Simultaneous, double-sided probing of wafers up to 200 mm (8″)
• Automatic handling, pattern recognition and probing
• High throughput cassette to cassette automation
• Customizable product enhancing hardware and software options
• Compatible with wide range of industry testers
• Configurable to high voltages in excess of 5 kV for specialized applications

| 응용분야

• Double-sided testing of discrete power semiconductors, metal-oxide semiconductor field-effect transistor (MOSFET) and insulated-gate bipolar transistor (IGBT) devices
• Testing of silicon based devices, newer wide-band gap (WBG) materials and compound semiconductors
• Test correlation

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