PEGASUS™ S200D
반자동 양면 프로브 스테이션: 200 mm 웨이퍼용
| 주요기능
• Simultaneous, double-sided probing of up wafers up to 200 mm (8″)
• Unique caliper arm and probe needle design
• Adjustable wafer size carriers
• Tuneable gram force and speed settings
• TTL, Ethernet (10BaseT), RS232 and IEEE 488 control interface
| 응용분야
• Double-sided testing of discrete power semiconductors, metal-oxide semiconductors and insulated-gate bipolar transistor (IGBT) devices
• Testing of silicon based devices, newer wide-band gap (WBG) materials and compound semiconductors
• Test correlation
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